JPS6257366U - - Google Patents
Info
- Publication number
- JPS6257366U JPS6257366U JP14951685U JP14951685U JPS6257366U JP S6257366 U JPS6257366 U JP S6257366U JP 14951685 U JP14951685 U JP 14951685U JP 14951685 U JP14951685 U JP 14951685U JP S6257366 U JPS6257366 U JP S6257366U
- Authority
- JP
- Japan
- Prior art keywords
- target
- vaporization chamber
- vaporizing
- jig
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008016 vaporization Effects 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14951685U JPS6257366U (en]) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14951685U JPS6257366U (en]) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6257366U true JPS6257366U (en]) | 1987-04-09 |
Family
ID=31064796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14951685U Pending JPS6257366U (en]) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6257366U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03192644A (ja) * | 1989-12-21 | 1991-08-22 | Hitachi Ltd | 半導体製造装置 |
-
1985
- 1985-09-30 JP JP14951685U patent/JPS6257366U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03192644A (ja) * | 1989-12-21 | 1991-08-22 | Hitachi Ltd | 半導体製造装置 |